Systematic Classification of LPCVD Processes
نویسندگان
چکیده
منابع مشابه
Systematic Classification of LPCVD Processes
A simple classification scheme of low pressure chemical vapor deposition processes is discussed which is based on only three different one-dimensional models of the radii film thickness distribution on silicon wafers processed in a conventionaI horizontal hot-wall reactor. Comparing Lhmretical predictions of these models with experimental results obtained from various LPCVD processes, a good qu...
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To use soil hydrology processe (SHP) models, which have increasingly extended during the last years, comprehensive knowledge about these models and their modeling approaches seems to be necessary. The modeling approaches can be categorized as either classical or non-classical. Classical approaches mainly model the SHP through solving the general unsaturated flow (Richards) equation, numerically...
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To use soil hydrology processes (SHP) models, which have increasingly extended during the last years, comprehensive knowledge about these models and their modeling approaches seems to be necessary. The modeling approaches can be categorized as either classical or non-classical. Classical approaches mainly model the SHP through solving the general unsaturated flow (Richards) equation, numericall...
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A new polysilicon bridge-slider structure (Fig. 1), in which one end of the bridge is fixed and the other is connected to a plate sliding in two flanged guideways, is designed and fabricated to study the strain at fracture of LPCVD polysilicon. In the experiments, a mechanical probe is used to push against the plate end, compressing and forcing the bridge to buckle until it breaks. The distance...
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to use soil hydrology processes (shp) models, which have increasingly extended during the last years, comprehensive knowledge about these models and their modeling approaches seems to be necessary. the modeling approaches can be categorized as either classical or non-classical. classical approaches mainly model the shp through solving the general unsaturated flow (richards) equation, numericall...
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ژورنال
عنوان ژورنال: Le Journal de Physique IV
سال: 1995
ISSN: 1155-4339
DOI: 10.1051/jphyscol:1995533